INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 92)

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XTM/2 Operating Manual
6 Determine the new density value with the following equation:
[1]
where:
D
1
= Initial density setting
T
x
= Thickness reading on the display
T
m
= Measured thickness
7 A quick check of the calculated density may be made by programming the
instrument with the new density value and observing that the displayed
thickness is equal to the measured thickness, provided that the instrument's
thickness has not been zeroed between the test deposition and entering the
calculated density.
NOTE: Slight adjustment of density may be necessary in order to
achieve T
x
= T
m
.
5.3 Determining Tooling
1 Place a test substrate in the system's substrate holder.
2 Make a short deposition and determine actual thickness.
3 Calculate tooling from the relationship:
[2]
where
T
m
= Actual thickness at substrate holder
T
x
= Thickness reading on the display
TF
i
= Initial tooling factor
4 Round off percent tooling to the nearest 0.1 %.
5 When entering this new value for tooling into the program, T
m
will equal T
x
if calculations are done properly.
NOTE: It is recommended that a minimum of three separate evaporations be
made when calibrating tooling. Variations in source distribution and
other system factors will contribute to slight thickness variations. An
average value tooling factor should be used for final calibrations.
Density gm cm
3 ⁄ ( )
D
1
T
x
T
m
-------
⎝ ⎠
⎛ ⎞
=
Tooling (%) TF
i
T
m
T
x
-------
⎝ ⎠
⎛ ⎞
=