INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 21)

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XTM/2 Operating Manual
1.2 Introduction to the Instrument
The XTM/2 is an economical quartz crystal transducer type deposition/etch
process monitor that incorporates the patented (US#5,117,192 — May
27,1992) ModeLock measurement system. This innovative system provides
process security, measurement speed and precision at a level that no active
oscillator based instrument can provide.The Liquid Crystal Display of the
XTM/2 is easily read and keeps the operator continuously informed with
pertinent deposition data including rate, thickness and elapsed time. Special
messages such as Crystal Fail, achievement of setpoints, measurement units
or etch mode are clearly presented to reduce operator uncertainty and eliminate
the possibility of costly mistakes. Basic instrument operation is easily verified
with a built-in test mode and preprogrammed parameters.The set up and
storage of nine different process variable sets is provided.The RATE and
THICKNESS displays as well as the limit parameters may be read and
programmed in the traditional kÅ units or directly in mass (mg, µgm,ngm).
All units come with RS232 (and support Data Rates to 9,600 Baud).The SECSII
protocol is supported.The optional computer interface is IEEE-488. Four relays
are used to manipulate various external devices such as source and sensor
shutters, heaters or valves.There are five input lines to provide the ability to
sense and react to discrete external signals.These instruments are fully
compatible with the complete family of INFICON transducers, excluding Dual
and CrystalSix®.