INFICON XTM/2 Thin Film Deposition Monitor User Manual

Page 140

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background image

Index - 2

IP

N 07

4-

18

6S

XTM/2 Operating Manual

rear panel

2-13

recorder output

1-6

reference oscillator

5-8

relays

3-14

Remote command

3-26

repair support

1-10

resonance

5-9

return material authorization

1-10

S

series resonance

5-12

source shutter

3-14

specifications

1-6

sputtering sensor

3-6

standard sensor

3-6

Status command

3-23

T

test mode

3-11

thickness shear mode

5-6

thickness twist mode

5-6

tooling

5-1

,

5-2

U

unpacking

2-1

Update Command

3-23

V

voltage selection

2-3

X

XIU (Crystal Interface Unit)

1-9

Z

zero displayed thickness

2-9

Z-Match equation

5-9

Z-Match technique

5-9

Z-Ratio

5-1

,

5-3

,

A-1

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