2 shuttered and dual sensors, 3 bakeable sensor – INFICON XTM/2 Thin Film Deposition Monitor User Manual

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XTM/2 Operating Manual

6.4.2 Shuttered and Dual Sensors

There is no difference in the crystal changing procedure between shuttered and
non-shuttered Standard and Compact sensors, since the shutter pivots away
from the crystal opening when the shutter is in the relaxed state.

6.4.3 Bakeable Sensor

For the Bakeable sensor, the procedure is the same as the regular crystal
except that you must first unlock the cam assembly by flipping it up. Once the
crystal has been replaced, place a flat edge of the holder flush with the cam
mechanism and lock it in place with the cam (

Figure 6-4

).

Figure 6-4 Bakeable Crystal Sensor (Exploded) (750-030/BAKEABLE)

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