INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 74)

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XTM/2 Operating Manual
3.8.5 Computer Command Details
3.8.5.1 Echo Command
Echoes the message, i.e., returns the sent message.
The format is: E message string
3.8.5.2 Hello Command
The HELLO command will return the string "XTM/2 VERSION x.xx" where x.xx
is the software revision code.
The format is: H
3.8.5.3 Query Command
The Query command returns information concerning current instrument
parameter values.
The format of the query command is:
Q P F - Query parameter P of film F. A space is used as a delimiter between P
and F, where F is a digit between 1 and 9, inclusive,
or
Q 6 - Query the current film number.
Table 3-6 Parameter Definition Table (for Query and Update Commands)
PP XTC/2 Parameter Range
0 Tooling 10 to 500.9 (%)
1 Final Thickness 0 to 999.9999 (kÅ/µgm/mgm)
2 SPT Thickness 0 to 999.9999 (kÅ/µgm/mgm)
3 Density 0.5 to 99.999 (gm/cc)
4 Z-ratio 0.1 to 9.999
5 SPT Time 00:00 to 99:59 (min:sec)
6 Film Number 1-9
99 All See note below
Note: Q 99 F returns parameters 0 to 5 for film F in the
order and ranges as specified above; each parameter is
separated by a space.