INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 127)

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XTM/2 Operating Manual
6.5.3 Sensor Cover Connection
The Crystal Sensor Emulator can be used to verify the measurement system for
INFICON's Thin Film Deposition Controllers and Monitors, including the
IC6000, XTC, IC/4 Plus, IC/4 MPT, XTC/2, XTC/C, XTM/2, and the IC/5.
NOTE: 760-601-G1 (obsolete) is not compatible for use with an IC/5 and IC/4.
760-601-G2 is fully compatible with all thin film deposition controllers.
However, the Crystal Sensor Emulator's Sensor Cover Connector is compatible
with some sensor heads, and is incompatible with others. This is discussed in
the following sections.
6.5.3.1 Compatible Sensor Heads
The Sensor Cover Connection will fit the sensor heads shown in Table 6-4 .
6.5.3.2 Incompatible Sensor Heads
The Sensor Heads for which the Crystal Sensor Emulator's Sensor Cover
Connector will not fit are shown in
Table 6-5 .
NOTE: The Crystal Sensor Emulator’s Sensor Cover will not fit the crystal
holder opening of the older style INFICON transducers that have the
"soldered" finger springs.
Table 6-4 Compatible Sensor Heads
Sensor Head Part Number
Standard Sensor Head 750-211-G1
Standard Sensor Head with Shutter 750-211-G2
Compact Sensor Head 750-213-G1
Compact Sensor Head with Shutter 750-213-G2
Dual Sensor Head 750-212-G2
Table 6-5 Incompatible Sensor Heads
Sensor Head Part Number
UHV Bakeable Sensor Head (12 inch) 007-219
UHV Bakeable Sensor Head (20 inch) 007-220
UHV Bakeable Sensor Head (30 inch) 007-221
UHV Bakeable Sensor Head w/ Shutter (12 inch) 750-012-G1
UHV Bakeable Sensor Head w/ Shutter (20 inch) 750-012-G2
UHV Bakeable Sensor Head w/ Shutter (30 inch) 750-012-G3
Sputtering Sensor Head 007-031
CrystalSix Sensor Head with position select 750-446-G1
CrystalSix Sensor Head 750-260-G1