INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 58)

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XTM/2 Operating Manual
3.4 Sensor Selection Guide
The choice of sensor type must be dictated by the process, the deposition
material and the physical characteristics of the process chamber. General
guidelines for each sensor type produced by INFICON are outlined in the
Sensor Selection table below. For specific recommendations, consult your
INFICON representative.
*These temperatures are conservative maximum device temperatures, limited by the properties
of Teflon at higher temperatures. In usage, the water cooling allows operation in environments
that are significantly elevated, without deleterious effects.
NOTE: Do not allow water tubes to freeze. This may happen if the tubes pass
through a cryogenic shroud and the water flow is interrupted.
NOTE: For best operation, limit the maximum input water temperature to less
than 30 °C.
NOTE: In high temperature environments more heat may transfer to the water
through the water tubes than through the actual transducer. In extreme
cases it may be advantageous to use a radiation shield over the water
tubes.
Table 3-1 Sensor Selection Table
Name IPN
Temp
°C
Crystal
Exchange
Utility
Connector Comments
Standard 750-211-G1 130° Front Side
Standard
w/Shutter 750-211-G2 130° Front Side
Compact 750-213-G1 130° Front Rear For tight spaces
Compact
W/Shutter 750-213-G2 130° Front Rear For tight spaces
Dual 750-212-G2 130° Front Side Two crystals for
crystal switch.
Includes Shutter
Sputtering 007-031 130° Rear Side For RF and diode
sputtering. (Optional
shutter available.)
Bakeable
12" (304.8 mm)
20" (508 mm)
30" (762 mm) 007-219
007-220
007-221 450° Front Side Must remove water
cooling and open the
tubes prior to bakeout
Bakeable
w/Shutter
12" (304.8 mm)
20" (508 mm)
30" (762 mm) 750-012-G1
750-012-G2
750-012-G3 450° Front Side Must remove water
cooling and open the
tubes prior to bakeout
CrystalSix 750-446-G1 130° Front Side 6 crystals for process
security.