INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 59)

3 - 7
IP
N 07
4-
18
6S
XTM/2 Operating Manual
3.5 Guidelines for Transducer Installation
WARNING
The performance of this instrument depends on the
careful installation of the chosen transducer. Improper
installation will cause problems with deposition
repeatability, crystal life and rate stability.
3.5.1 Sensor Installation
Figure 3-3 shows a typical installation of an INFICON water cooled crystal
sensor in the vacuum process chamber. Use the illustration and the following
guidelines to install your sensors for optimum performance and convenience.