1 standard and compact – INFICON XTM/2 Thin Film Deposition Monitor User Manual
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XTM/2 Operating Manual
6.4.1 Standard and Compact
Follow the procedure below to replace the crystal in the Standard and Compact
sensor: (see
)
1
Gripping the crystal holder with your fingers, pull it straight out of the sensor
body.
2
Gently pry the crystal retainer from the holder (or use crystal snatcher; see
).
3
Turn the retainer over and the crystal will drop out.
4
Install a new crystal, with the patterned electrode face up.
5
Push the retainer back into the holder and replace the holder in the sensor
body.
Figure 6-3 Standard Crystal Sensor (Exploded) (750-030/S&D HEAD)
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