INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 24)

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XTM/2 Operating Manual
1.3.1.8 Operation
Power Requirements
"115 V" input range. . . . . . . . . . 90 to 132 V(ac), 49 to 61 Hz, 45 VA max.
fused at 3/8 Amp Type T fuse
"230 V" input range . . . . . . . . . 180 to 264 V(ac), 49 to 61 Hz, 45 VA max.
fused at 3/16 Amp Type T fuse
Operating Temperature . . . . . . . . . 0 to 50 °C (32 to 122 °F)
1.3.1.9 Mechanical
Size . . . . . . . . . . . . . . . . . . . . . . . . 3.5" H x 8" W x 12" D
(89 mm H x 203 mm W x 305 D mm)
Weight . . . . . . . . . . . . . . . . . . . . . . 6 lb. (2.7 kg)
1.3.2 Transducer Specifications (optional)
Max. Bakeout
Temperature* Size (Max. Envelope) Water Tube &
Coax Length Body & Holder IPN
Standard Sensor 130 °C 1.063" x 1.33" x .69" high
(27 mm dia. x 34 mm x 17.5 mm high) 30" (762 mm) 304 SS 750-211-G1
Standard Sensor
with Shutter 130 °C 1.06" x 2.24" x .69" high
(27 mm dia. x 57 mm x 17.5 mm high) 30" (762 mm) 304 SS 750-211-G2
Sputtering Sensor 105 °C 1.36" dia. x .47" high
(34.5 mm dia. x 11.8 mm high) 30" (762 mm) Au-plated BeCu 007-031
Compact Sensor 130 °C 1.11" x 1.06" x 1.06" high
(28 mm x 27 mm x 27 mm high) 30" (762 mm) 304 SS 750-213-G1
Compact Sensor
with Shutter 130 °C 2.08" x 1.62" x 1.83" high
(53 mm x 41 mm x 46 mm high) 30" (762 mm) 304 SS 750-213-G2
UHV Bakeable
Sensor 450 °C 1.35" x 1.38" x .94" high
(34 mm x 35 mm x 24 mm high) 12" (305 mm)
20" (508 mm)
30" (762 mm) 304 SS 007-219
007-220
007-221
UHV Bakeable
Sensor with Shutter 400 °C 1.46" x 1.37" x 1.21" high
(37 mm x 35 mm x 3.1 mm high) 12" (305 mm)
20" (508 mm)
30" (762 mm) 304 SS 750-012-G1
750-012-G2
750-012-G3
Shutter Assembly 400 °C two models available N/A 300-series SS 750-210-G1
750-005-G1
(Sputtering)
*For Bake only; waterflow is required for actual deposition monitoring. These temperatures are conservative maximum
device temperatures, limited by the properties of Teflon (PTFE) at higher temperatures. In usage, the water cooling allows
operation in environments that are significantly elevated, without deleterious affects.