2 % xtal life – INFICON XTM/2 Thin Film Deposition Monitor User Manual
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XTM/2 Operating Manual
5
Connect the In-Vacuum Cable to the Sensor Head.
Verify there is continuity (<0.2 ohm) from the finger spring contact in the
Sensor Head to the center pin on the un-terminated end of the
In-Vacuum cable.
Verify there is isolation (>10 megohm) between the finger spring contact
and the In-Vacuum cable shield.
If the Sensor Head or the In-Vacuum cable system is found to be defective, look
for defective contacts at the In-Vacuum cable to Sensor Head connection,
repair or replace the Sensor Head as necessary. Re-attach the In-Vacuum
cable to the Feed-Through and repeat this procedure starting at step 2.
6
Ensure that the leaf springs in the Sensor Head and those in the ceramic
retainer are bent to an angle of approximately 60 degrees from flat.
6.5.1.4 System Diagnostics Pass But
Crystal Fail Message Remains
If the system is operating properly, yet the Crystal Fail message is still
displayed, perform the following tasks.
1
On the ceramic retainer verify that the center rivet is secure. Repair or
replace the ceramic retainer as necessary.
2
Inspect the inside of the Crystal Cover for build-up of material. Clean or
replace the Crystal Cover as necessary.
After verifying the Sensor Head contacts, the Sensor Head/In-Vacuum cable
connection, and the ceramic retainer contacts, re-assemble the system. If the
Crystal Fail message remains, replace the monitor crystal with a good monitor
crystal. Verify that the monitor crystal works properly by inserting it into a known
good measurement system. If you continue to experience problems, contact an
INFICON Applications Engineer for Technical Support.
6.5.2 % XTAL Life
The Crystal Sensor Emulator contains a quartz crystal having a fundamental
frequency at 5.5 MHz. With the Crystal Sensor Emulator connected, the
% XTAL Life display should read:
approximately 45% for deposition controllers which allow a 1 MHz
frequency shift.
approximately 38% for deposition controllers which allow a 1.25 MHz
frequency shift
approximately 30% for deposition controllers which allow a 1.5 MHz
frequency