INFICON XTM/2 Thin Film Deposition Monitor User Manual
Page 76
3 - 24
IP
N 07
4-
18
6S
XTM/2 Operating Manual
S 6 . . . . . Output status - returns 8 ASCII bytes each with a value of 0 or 1.
S 7 . . . . . Input status - returns 8 ASCII bytes each with a value of 0 or 1.
S 8 . . . . . Present frequency of Crystal
Sxxxxxx.xD
where
x is any digit 0 to 9
S character is a space when good readings are available or a
negative sign for failed crystals
D character is:
0 when there is 0.25 second averaging
0 or 5 when there is 1 second averaging
Even Digit when there is 4 second averaging
x when there is 16 second averaging
S 9 . . . . . Crystal fail, 1 = Fail, 0 = Good
S6 Response String
Output # Function
1
Source Shutter
2
Thick SPT
3
Timer SPT
4
Sensor Fail
Byte
8
7
6
5
4
3
2
1
not used
1 = closed contacts
S7 Response Strings
Input #
Function
1
Open Shutter
2
Close Shutter
3
Zero Thickness
4
Zero Timer
5
Crystal Fail Inhibit
Byte
8
7
6
5
4
3
2
1
not used
1 = grounded (active)