INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 60)

3 - 8
IP
N 07
4-
18
6S
XTM/2 Operating Manual
Figure 3-3 Typical Installation
Mounting Bracket
Coax Cable
(Routed with
Water Tubes)
Or,
Customer Supplied
Cajon Coupling
Brazing
Adapters
Water In
Water Out
XIU (Oscillator)
T
o Pi
ns
1,
2
Source
Source
Shutter
Pneumatic
Actuator
To
Source Controller
Source to Sensor
10" Minimum
Sensor
Shutter
Air, 80 PSI, 110 PSI Max.
Manual
IPN 007-199
Shutter
Solenoid
Assembly
or
S
y
st
em
I/
O
Man
ual
Con
tro
l
Out
In
IPN 757-302-G1
Switching