INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 129)

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XTM/2 Operating Manual
Appendix A
Table of Densities and Z-ratios
The following table represents the content of the instrument's material library.
The list is alphabetical by chemical formula.
CAUTION
Some of these materials are toxic. Please consult the
material safety data sheet and safety instructions
before use.
Remote Communications Responses and Commands use the code value to
represent a specific material. An * is used to indicate that a Z-ratio has not been
established for a certain material. A value of 1.000 is defaulted in these
situations.
Table A-1 Material Table
Formula Density Z-ratio Material Name
Ag 10.5000 0.529 Silver
AgBr 6.470 1.180 Silver Bromide
AgCl 5.560 1.320 Silver Chloride
Al 2.700 1.080 Aluminum
Al
2
O
3
3.970 0.336 Aluminum Oxide
Al
4
C
3
2.360 *1.000 Aluminum Carbide
AIF
3
3.070 *1.000 Aluminum Fluoride
AIN 3.260 *1.000 Aluminum Nitride
AlSb 4.360 0.743 Aluminum Antimonide
As 5.730 0.966 Arsenic
As
2
Se
3
4.750 *1.000 Arsenic Selenide
Au 19.300 0.381 Gold
B 2.370 0.389 Boron
B
2
O
3
1.820 *1.000 Boron Oxide
B
4
C 2.370 *1.000 Boron Carbide
Ba 3.500 2.100 Barium
BaF
2
4.886 0.793 Barium Fluoride
BaN
2
O
6
3.244 1.261 Barium Nitrate
BaO 5.720 *1.000 Barium Oxide