INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 22)

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XTM/2 Operating Manual
1.3 Specifications
At the time of this manual’s writing, the specifications for performance are as
published below. INFICON continuously improves its products, affecting the
instrument’s performance.
1.3.1 Specifications XTM/2
1.3.1.1 General
Usage . . . . . . . . . . . . . . . . . . . . . . Indoor use only.
Altitude Range . . . . . . . . . . . . . . . . Up to 2000 m (6,561 ft)
Pollution Degree . . . . . . . . . . . . . . 1—No pollution occurs
Overvoltage Category . . . . . . . . . . 2—Local level, appliances, etc.
Cleaning . . . . . . . . . . . . . . . . . . . . The unit enclosure can be safely cleaned
with a mild detergent or spray cleaner
designed for that purpose. Care should be
taken to prevent any cleaner from entering
the unit.
1.3.1.2 Measurement
Crystal Range & Precision . . . . . . . 6.0 to 5.0 MHz +/- 0.1 Hz
(per 250 msec sample)
Thickness & Rate Resolution* . . . . 0.123Å (per 250 msec sample)
* Material density = 1.0; Z-ratio = 1.0;
crystal frequency = 6 MHz.
Å/S/M = Angstroms/second/measurement.
Thickness accuracy . . . . . . . . . . . . 0.5%
Measurements/second . . . . . . . . . . 4 max., user selectable multiple
measurement averaging to 16 seconds in
four ranges.
1.3.1.3 Recorder Output
Voltage . . . . . . . . . . . . . . . . . . . . . 0 to ±10 v
Resolution . . . . . . . . . . . . . . . . . . . 13 bits over full range
(one reserved for sign)
Update Rate . . . . . . . . . . . . . . . . . 4 Hz
Function. . . . . . . . . . . . . . . . . . . . . Rate / Thickness / Mass
Maximum Load . . . . . . . . . . . . . . . 2.0 KOhm (100 Ohm internal impedance)