INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 87)

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XTM/2 Operating Manual
4.2 State Descriptions
Operating the XTM/2 as a film thickness/rate monitor requires programing the
film parameters, refer to
section 2.6 on page 2-22 . A film sequence begins with
a OPEN command and ends when the film in process reaches the FINAL
THICKNESS or the CLOSE switch is pressed. The RATE and THICKNESS
displayed is modified by the values programmed in the possible parameters
and the units used are set by the configuration switches, refer to
section 2.5.2
on page 2-15 .
In reviewing the state diagram of Figure 4-2 on page 4-2 , note that there are
only two basic machine states, SHUTTER OPEN or SHUTTER CLOSED. On
power-up, the machine proceeds to the SHUTTER CLOSED state after
performing a series of memory checks. Various abnormal conditions are
indicated by ERR# messages, see
section 6.2.1 on page 6-1 and section 6.2.2
on page 6-2 . The operations indicated by a pointing finger are manual key
strokes or the equivalent system hardware input or computer communications
command.
In addition, there are two basic display modes: Operate and Program. Pressing
the PROG switch at any time alternates between these modes.
Information may be stored and recalled for nine setups. The particular setup is
chosen by moving the cursor to the FILM parameter and selecting 1-9. In
addition, Film 0 is preprogrammed for Test Mode use, refer to
section 3.6 on
page 3-11 .
Table 4-1 State Descriptions
State Condition
Source
Shutter
1. SHUTTER CLOSED Will accept an OPEN command. Open
2. SHUTTER OPEN Will accept a CLOSE command. Closed