INFICON XTM/2 Thin Film Deposition Monitor User Manual
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XTM/2 Operating Manual
11
The time begins to increment from 00:00 and the deposition rate will be 16.1
Å/s. The THICK SPT annunciator is lit at 1.000 kÅ and the TIMER SPT lights
at 1:00 min:sec. Reaching the FINAL THICKNESS parameter of 2.000 kÅ
takes and elapsed time of 02:05, then after reaching FINAL THICKNESS
limit the SHUTTER OPEN annunciator disappears. The clock immediately
begins counting up from 00:00 again.
12
The instrument will remain in this mode until OPEN is pressed.
13
When OPEN is pressed, the process will repeat steps 11 through 13.
14
After successful completion of the above steps, power down the instrument
to leave the TEST mode by turning configuration switch 1 "OFF" and then
placing the unit first in STBY and then "ON" to read the new configuration.