INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 113)

A - 3
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SQM-160 Operating Manual
CoO 6.440 0.412 Cobalt Oxide
Cr 7.200 0.305 Chromium
Cr
2
O
3
5.210 *1.000 Chromium (III) Oxide
Cr
3
C
2
6.680 *1.000 Chromium Carbide
CrB 6.170 *1.000 Chromium Boride
Cs 1.870 *1.000 Cesium
Cs
2
SO
4
4.243 1.212 Cesium Sulfate
CsBr 4.456 1.410 Cesium Bromide
CsCI 3.988 1.399 Cesium Chloride
CsI 4.516 1.542 Cesium Iodide
Cu 8.930 0.437 Copper
Cu
2
O 6.000 *1.000 Copper Oxide
Cu
2
S 5.600 0.690 Copper (I) Sulfide (Alpha)
Cu
2
S 5.800 0.670 Copper (I) Sulfide (Beta)
CuS 4.600 0.820 Copper (II) Sulfide
Dy 8.550 0.600 Dysprosium
DY
2
O
3
7.810 *1.000 Dysprosium Oxide
Er 9.050 0.740 Erbium
Er
2
O
3
8.640 *1.000 Erbium Oxide
Eu 5.260 *1.000 Europium
EuF
2
6.500 *1.000 Europium Fluoride
Fe 7.860 0.349 Iron
Fe
2
O
3
5.240 *1.000 Iron Oxide
FeO 5.700 *1.000 Iron Oxide
FeS 4.840 *1.000 Iron Sulphide
Ga 5.930 0.593 Gallium
Ga
2
O
3
5.880 *1.000 Gallium Oxide (B)
GaAs 5.310 1.590 Gallium Arsenide
GaN 6.100 *1.000 Gallium Nitride
GaP 4.100 *1.000 Gallium Phosphide
GaSb 5.600 *1.000 Gallium Antimonide
Gd 7.890 0.670 Gadolinium
Gd
2
O
3
7.410 *1.000 Gadolinium Oxide
Table A-1 Material Table (continued)
Formula Density Z-Ratio Material Name