INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 17)

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SQM-160 Operating Manual
1.3.1 Returning Your SQM-160
Do not return any component of your SQM-160 to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your SQM-160.
Prior to being given an RMA number, you may be required to complete a
Declaration Of Contamination (DOC) form if your sensor has been exposed to
process materials. DOC forms must be approved by INFICON before an RMA
number is issued. INFICON may require that the sensor be sent to a designated
decontamination facility, not to the factory.
1.4 Specifications
1.4.1 Measurement
Number of Sensors . . . . . . . . . . . . . 2 standard, 4 additional optional
Sensor Frequency Range . . . . . . . . 4.0 MHz to 6.0 MHz
Reference Frequency Accuracy . . . . 0.002%
Reference Frequency Stability . . . . . +/- 2ppm (total, 0 to 50°C)
Thickness Display Resolution . . . . . 1 Å
Frequency Resolution* . . . . . . . . . . . +/- 0.12 Hz (Std.), +/- 0.03 Hz (HiRes)
Rate Resolution* . . . . . . . . . . . . . . . 0.60 Å/s (Std.), 0.037 Å/s (HiRes)
Thickness Resolution* . . . . . . . . . . . 0.15 Å (Std.), 0.037 Å (HiRes)
*Density = 1, Period = 4 rdgs/sec (Std.) 10 rdgs/s (HiRes)
1.4.2 Film Parameters
Stored Films . . . . . . . . . . . . . . . . . . . 99
Density . . . . . . . . . . . . . . . . . . . . . . . 0.5 – 99.99 gm/cc
Tooling . . . . . . . . . . . . . . . . . . . . . . . 10 – 399 %
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.10 – 10.00
Final Thickness . . . . . . . . . . . . . . . . 0.000 – 99.99 kÅ
Thickness Setpoint . . . . . . . . . . . . . . 0.000 – 99.99 kÅ
Time Setpoint . . . . . . . . . . . . . . . . . . 0:00 – 99:59 mm:ss
Sample/Hold. . . . . . . . . . . . . . . . . . . 0-9999 s
Sensor Average . . . . . . . . . . . . . . . . Any combination of installed sensors