5 sensor selection, Or(s). see, Section 3.5 on – INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
3.5 Sensor Selection
The SQM-160 comes standard with two sensor inputs. Four additional sensors are
available by adding a Sensor Option Card. A specific sensor can be assigned to
each film, or multiple sensors can be averaged for a film. The averaging option
provides more uniform coverage of the deposition area and provides a backup
sensor capability. If one of multiple sensors assigned to a film fails, the sensor is
automatically removed from rate/thickness calculations.
NOTE: If Relay 2 Dual is selected in the System Menu, Sensors 1 and 2 are set
up as a primary/secondary sensor pair. In that case, sensor averaging is
disabled. See
for information on dual sensors.
To assign a sensor, or sensors, to a film:
1
Press Program to enter Program mode.
2
Use the Control Knob to scroll to the desired Film # (1-9).
3
Press the Control Knob or Next to enter the film parameters for the selected
film.
4
Press Next until SENS AVG is shown.
5
Use the Control Knob to scroll through the sensors in Display 2.
6
Press the Control Knob to toggle the sensor on/off.
Sensor status can be seen by observing the Crystal Status LEDs:
If the LED is not illuminated, the crystal is disabled.
If the LED is illuminated, the crystal is enabled and receiving valid readings.
If the LED is blinking, the crystal is enabled, but is not receiving valid
readings.
7
Continue selecting sensors until the Crystal Status LEDs indicate the desired
setup.
8
Press Program to exit the Film Menu and return to normal mode.
9
Turn the Control Knob to sequence though each sensor's reading on Display 1.
When a single number is shown in Display 2 it is the sensor number whose
readings are shown in Display 1. When time is shown in Display 2, Display 1
shows the average of all assigned sensors.