INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 78)

6 - 2
IP
N 07
4-
51
1-
P1
C
SQM-160 Operating Manual
6.2 Troubleshooting
6.2.1 Troubleshooting the SQM-160
Table 6-1 General Troubleshooting
SYMPTOM CAUSE REMEDY
1. Crystal fail message is
always on. a. Oscillator and/or sensor
not connected. a. Verify proper
Oscilator/sensor
connections.
b. SQM-160 malfunctioning. b. If available, insert a known
working QCM, in place of
suspect one; if the SQM-160
is confirmed bad, contact
INFICON service
department.
c. Defective cable from
feedthrough to oscillator. c. Use an Ohm meter or
DMM to check electrical
continuity or isolation as
appropriate.
d. Poor electrical contact in
the sensor, feedthroughs, or
in-vacuum cable. d. Use an Ohm meter or
DMM to check electrical
continuity or isolation as
appropriate.
e. Failed crystal/no crystal. e. Replace crystal with new
INFICON crystal.
f. Two crystals placed into the
crystal holder. f. Remove one of the
crystals.
g. Frequency of crystal out of
range, g. Verify that the crystal
frequency is within the
required range, use
INFICON crystals. Set the
desired range on the main
screen on the software.
2. Noisy signal a. Distance from sensor to
SQM-160 is longer than
40 in. (101.6 cm). a. Replace cables to
preserve the maximum
allowable length.
b. Mechanical/electric noise
sources located near the
SQM-160/cable . b. Look for potential noise
sources. Reposition the
SQM-160/cables
accordingly.