INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
If the Communications Setup dialog box is displayed, no Monitor was found on the
expected comm port. Follow the instructions in
of this manual to establish communications. The top tool bar
is only visible if communications has been established with an SQM-160.
Otherwise, an SQM-160 Offline status message is displayed.
The main window menus allow additional configuration of the program, and the
connected SQM-160 Thin Film Monitor. Some menu selections are not available
during data acquisition, or if SQM-160 communications are not established. The
main window control functions are shown below.
Film . . . . . . . . . . . . . . . . . . . . . . . . . This drop-down list box selects the film on the
SQM-160 that will be used for rate/thickness
measurements. Defaults on startup to the
first SQM-160 film.
Start/Stop . . . . . . . . . . . . . . . . . . . . Causes the program to start/stop SQM-160
data acquisition. Graphing and display of
readings from the SQM-160 start/stop
immediately when this control is toggled.
Open/Close Shutter . . . . . . . . . . . . Toggles the SQM-160 shutter relay. Opening
the shutter automatically starts SQM-160
data acquisition. However, closing the
shutter does not automatically stop data
acquisition.
Zero . . . . . . . . . . . . . . . . . . . . . . . . . Zeros the thickness reading on the
SQM-160.
The remaining main window controls display readings from the SQM-160 Monitor.
Graph. . . . . . . . . . . . . . . . . . . . . . . . Displays rate readings from the SQM-160. A
graph of each sensor assigned to the film, or
an average of all assigned sensors, can be
selected on the View menu.
Elapsed Time . . . . . . . . . . . . . . . . . Displays the elapsed deposition time since
the Start switch was pressed.
Time Remaining . . . . . . . . . . . . . . . Displays the calculated deposition time
remaining based on the current thickness
and current rate, and final thickness setpoint.
Final Thickness . . . . . . . . . . . . . . . The desired deposition thickness for the
selected film. Final thicknesss setpoint can
be set on the Film menu (see
Average Thickness. . . . . . . . . . . . . The current film thickness, based on the
average of all sensors assigned to the
selected film.