6 film setup – INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
2.6 Film Setup
This section will help you set up the SQM-160 to measure a film. See
, for detailed programming instructions.
1
Enter Program Mode
Press Program to enter the film setup menu. If the Crystal Life display is shown,
press Xtal Life to return to Rate/Thickness mode, then press Program.
2
Select a Film
Turn the Control Knob to select one of the 99 possible films, then press the
Control Knob to enter that Film Menu.
3
Set Film Parameters
Turn the Control Knob to set the first film parameter (Density). The parameter
value is shown in Display 2. Press the Control Knob to save the value and move
to the next parameter. Press Clear to return the film parameter to its original
value. Continue to set each parameter. Be sure to press the Control Knob to
store each parameter. Press Program to exit Program mode and return to
normal mode.
4
Set System Parameters
To Enter the System Menu, press Program, then Prev. Select and set system
parameters by turning and then pressing the Control Knob as described above.
Press Program to return to Normal mode.
If the sensor(s) selected during Film setup are connected properly to the SQM-160,
the Crystal Status LEDs should be illuminated. If not, return to the Film Menu and
set the Sensor Average parameter to the desired sensor(s). See
for detailed information on assigning sensors to a film.
If the Crystal Status LED is flashing, the sensor is most likely not properly
connected. A small test crystal, supplied with each oscillator module, can be used
to test sensor connections external to the vacuum chamber. To use the test crystal,
disconnect the oscillator from its 6 in. BNC cable. Attach the test crystal to the
oscillator's feedthrough connector. The Crystal Status LED will remain illuminated
if the external sensor connections are correct.
See
section 6.2.2, Troubleshooting Sensors, on page 6-3
for assistance in
troubleshooting sensor problems.