INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
Film Name . . . . . . . . . . . . . . . . . . . . The name that is displayed in the films
database, films to download lists, and in the
SQM-160 films menu. Names are limited to
a maximum of eight alphanumeric
characters. No spaces or special characters
are allowed.
Final Thickness . . . . . . . . . . . . . . . The desired film thickness setpoint. When
the Final Thickness is reached, the SQM-160
shutter relay opens and Final Thk LED lights.
Thickness Setpoint . . . . . . . . . . . . An additional thickness setpoint that closes
the thickness setpoint relay and lights the
Thk SP LED on the SQM-160.
Time Setpoint . . . . . . . . . . . . . . . . . Elapsed time that closes the Timer Setpoint
relay and lights Time SP LED on the
SQM-160.
Material . . . . . . . . . . . . . . . . . . . . . . List of available database materials.
Materials named UnitMat# are unknown
materials uploaded from the SQM-160.
Density . . . . . . . . . . . . . . . . . . . . . . Density of the selected material. Values from
0.5 to 99.99 gm/cc are valid.
Z-Factor (Z-Ratio) . . . . . . . . . . . . . . Z-Ratio of the selected material. Consult the
Z-Ratio values. Values of 0.1 to 10 are valid.
Add Material . . . . . . . . . . . . . . . . . . Enter a new material into the materials
database.
Tooling. . . . . . . . . . . . . . . . . . . . . . . Correction for differences in material
deposited on substrate, versus what is
deposited on sensors. This correction
applies to all sensors used for this film.
Values from 10 to 399 are valid. The System
setup dialog box contains tooling corrections
for individual sensors. Consult the
for more details.
Sensors . . . . . . . . . . . . . . . . . . . . . . Selects the sensors that are used in
calculating rate/thickness for this film. If
more than one sensor is selected, the
average of the sensors is used to determine
rate and thickness.