INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 26)

2 - 4
IP
N 07
4-
51
1-
P1
C
SQM-160 Operating Manual
RS-232
Connection to computer for programming and data acquisition. See Chapter 5,
Communications .
USB/Ethernet
Optional connection to computer USB or Ethernet port for programming and data
acquisition. See
Chapter 5, Communications .
Option Card
Provides four additional sensor measurement channels.
Measurement ground terminal useful for common system and cable grounding.
Power Connector
WARNING
Use removable power cords only of the specified type
and rating, attached to a properly grounded receptacle.
2.5 System Connections
Figure 2-3 shows typical vacuum system wiring.
WARNING - Risk Of Electric Shock
WARNING: Maintain adequate insulation and physical
separation of sensor wiring from hazardous voltages.