6 system menu – INFICON SQM-160 Thin Film Deposition Monitor User Manual

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SQM-160 Operating Manual

4.6 System Menu

This menu allows system parameters to be sent to, and read from, a connected
SQM-160. These parameters appear in the System Menu of the SQM-160.
System parameters are not saved in the disk database.

Figure 4-5 System Dialog Box

Save. . . . . . . . . . . . . . . . . . . . . . . . . Sends the on-screen settings to the

SQM-160 and closes the System dialog box.

Close . . . . . . . . . . . . . . . . . . . . . . . . Closes the System dialog box without

sending parameters to the SQM-160.

Read . . . . . . . . . . . . . . . . . . . . . . . . Reads the SQM-160 system menu

parameters into the System dialog box.

Simulate Mode . . . . . . . . . . . . . . . . In simulate mode, the SQM-160 simulates

sensor inputs (for test purposes only).

Freq Display . . . . . . . . . . . . . . . . . . Selects whether or not to display crystal

frequency.

Rate Resolution . . . . . . . . . . . . . . . Selects high (0.01 Å/s) or low (0.1 Å/s) rate

resolution on the SQM-160 main window.

Etch Mode . . . . . . . . . . . . . . . . . . . . Sets the rate and thickness sign to negative

for etching applications.

Filter . . . . . . . . . . . . . . . . . . . . . . . . The number of readings averaged for rate

display. One to twenty are valid.

Timebase. . . . . . . . . . . . . . . . . . . . . The time for a single measurement. 0.15 to

2.0 seconds are valid.

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