INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 23)

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SQM-160 Operating Manual
Chapter 2
Quick Start
2.1 Introduction
This section assumes you are familiar with thin film monitors. See section 2.3,
Front Panel, on page 2-2 and section 2.4, Rear Panel, on page 2-3 for basic system
use and connection information.
2.2 Installation
WARNING - Risk Of Electric Shock
Maintain adequate insulation and physical separation of
sensor, I/O, and wiring from hazardous voltages.
1 Rack Installation
The SQM-160 occupies a 3.5 in. high, half-rack space. Rack installation
requires an optional half-rack adapter kit or a full rack extender kit. Install the
SQM-160 in a 19 in. rack with the appropriate hardware. See
section 3.21,
Rack Mounting Procedure, on page 3-18 , for detailed installation instructions.
2 Power Connection
WARNING - Risk Of Electric Shock
Verify that the power cable provided is connected to a
properly grounded mains receptacle.
3 Sensor Connections
Connect the BNC cables and oscillator from your vacuum chamber
feedthrough to the SQM-160 Sensor Input(s). See
section 2.4 on page 2-3 .
4 Digital I/O Connections
Refer to section 3.20, I/O Connections, on page 3-16 for details on wiring digital
I/O to the SQM-160 Relay I/O connector.
5 Computer Connection
If you would like to use the supplied Windows Comm software with the
SQM-160, see
section Chapter 4, SQM-160 Comm Software, on page 4-1 .