INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 57)

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SQM-160 Operating Manual
Min. Frequency . . . . . . . . . . . . . . . . The minimum expected crystal frequency,
typically 5 MHz. Frequency readings below
the minimum generate a crystal fail error.
4.0 MHz to 6.0 MHz are valid.
Max. Frequency . . . . . . . . . . . . . . . The maximum expected crystal frequency,
typically 6 MHz. Frequency readings above
the maximum generate a crystal fail error.
4.1 MHz to 6.1 MHz are valid.
X Tooling . . . . . . . . . . . . . . . . . . . . . Tooling value assigned to each sensor.
Applies to all films.
Analog Out parameters apply only if the SQM-160 Option Card is installed.
Min Thickness. . . . . . . . . . . . . . . . . Thickness for Zero Output (zero volts)
Max Thickness . . . . . . . . . . . . . . . . Thickness for Full Scale Output (five volts)
Min. Rate . . . . . . . . . . . . . . . . . . . . . Rate for Zero Output (zero volts)
Max. Rate. . . . . . . . . . . . . . . . . . . . . Rate for Full Scale Output (five volts)
4.7 Communications Menu
The communications setup screen allows setup and troubleshooting of the
SQM-160 serial communications connection.
Figure 4-6 Communicatons Dialog Box
To connect the SQM-160 Thin Film Monitor to your computer, you will need a 9 pin
male to 9 pin female "straight thru" RS-232 cable. A cable is supplied with each
SQM-160 monitor or can be purchased at any computer store.
To establish communications with the SQM-160, follow these steps.
1 Verify the SQM-160 Monitor is turned on, and connected to the computer with
a straight-thru cable.