4 rear panel – INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
Configuration Section
Push-button to enter/exit program mode.
Push-button to cancel a change and return to original value.
Push-buttons to move to Next/Previous parameter.
Setpoint LEDs
Illuminates when the indicated setpoint is reached.
Crystal Status LEDs
Illuminates when the crystal is active and operating properly.
Flashes when an active crystal fails.
Extinguished when that crystal is not being used.
Control Knob
Used to adjust values or scroll though menu selections.
Pushing the control knob stores the current setting.
2.4 Rear Panel
Figure 2-2 Rear Panel
Sensor 1 & 2
Connection to quartz crystal sensors. See
for detailed
hookup information.
Rate and Thick Outputs
Provides 0-5 V analog outputs for Sensor 1 & 2 rate and thickness readings. For
connection to strip chart recorders, etc.
Relay I/O
Connects 4 relays and 4 digital inputs to external devices. See
for connections.
Sensor 1
Sensor 2
RS-232
Option Card
Relay I/O
100-120/200-240V~
50/60 Hz
20 W
Thick Out
Rate Out
3
Sensor
4
5
6
Fuse T2.5A 250V
USB/Ethernet