3 command: b, 4 command: c – INFICON SQM-160 Thin Film Deposition Monitor User Manual

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SQM-160 Operating Manual

embedded in a Label, use an underscore
character '_'. Each parameter is separated
by a space.

Each film's parameters are accessed by
using the ASCII character associated with
film number directly after the Command. For
example Film 1-9 are ASCII characters "1"
(ASC 49) to "9" (ASC 57). Film 10 is a ":"
character (ASC 58), etc. The parameters are
edited by adding a value after the command
film number.

The parameters are inspected by issuing a
command, film number, then a question
mark. An example of the Set/Get command
for Film 4 is:

A4 LENS_1 6.23 125 1.05 1.525 0.450 30 1
A4?A LENS 1 6.23 125 1.05 1.525 0.450 30 1

5.4.3 Command: B

Description: . . . . . . . . . . . . . . . . . . . System 1 parameters. The parameters

available for change or inspection are Time
Base, Simulation Mode, Frequency Mode,
Rate Resolution, Rate Filter, Crystal Tooling
and the parameters are sent/retrieved in that
order.

Example: . . . . . . . . . . . . . . . . . . . . . B? A0.25 0 0 0 8 100 100 100 100 100 100

5.4.4 Command: C

Description: . . . . . . . . . . . . . . . . . . . System 2 parameters. The parameters

available for change or inspection are
Minimum Frequency, Maximum Frequency,
Minimum Rate, Maximum Rate, Minimum
Thickness, Maximum Thickness, Etch Mode
and the parameters are sent/retrieved in that
order.

Example: . . . . . . . . . . . . . . . . . . . . . C? 5.000 6.000 0.000 100.00 0.000 1.000 0

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