Chapter 3 operation, 1 introduction, 2 menu selection – INFICON SQM-160 Thin Film Deposition Monitor User Manual
Page 31: Chapter 3, Operation
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SQM-160 Operating Manual
Chapter 3
Operation
3.1 Introduction
This chapter details the operation of the SQM-160 menus and front panel controls.
3.2 Menu Selection
Two menus provide control of the SQM-160 programming. The Film Menu
customizes each stored film. The System Menu sets values that remain constant
for all films.
The Configuration section of the SQM-160 front panel contains four switches used
to access the program menus. Within the program menus, the Control Knob is also
used to adjust values and select menu choices. In program mode, Display 1 shows
the parameter to be changed. Display 2 shows the selected parameter's value.
NOTE: If Crystal Life is shown on the SQM-160 displays, press the Xtal Life
switches to return the displays to normal rate/thickness or frequency
display.
To enter the Film Menu, press Program. The SQM-160 displays the currently
selected film. If desired, turn, then press, the Control Knob to select a different film.
Press Next to display the first parameter for the selected film.
To enter the System Menu, press Program then press Prev.
Figure 3-1 SQM-160 Front Panel
Control
Configuration
Crystal Status
Rate A/s
Thickness kA
Time
Zero
Next
Prev
Clear
Program
Xtal Life
Shutter
Open
Closed
Time SP
Thk SP
Final Thk
1
3
5
2
4
6
Press Next to
move through the
Film menu
Press Prev then
Next to move through
the System menu
Press
Program
to access
menus
Display 1
Display 2