Table 3-1 – INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
Table 3-1 Film Menu
Display
Description
Range
Default
Units
DENSITY
Density of the material being deposited.
Consult the
for common material
densities.
0.5 – 99.99
1.00
gm/cc
TOOLING
Overall Tooling Factor for this film. See
10 – 399
100
%
Z-FACTOR
(Z-Ratio)
Z-Factor of the material being deposited.
See
Z-Factors.
0.10 – 10.00
1.0
FINL THK
Desired Final Thickness of deposited
material. Illuminates Final Thk LED when
reached.
0.000 – 99.99
0.500
kÅ
THK SET
Thickness value that closes the Thickness
Setpoint relay and illuminates Thk SP LED.
Not available when Sampling is ON in
System Menu.
0.000 – 99.99
0
kÅ
TIME SET
Elapsed time that closes the Timer Setpoint
relay and illuminates Time SP LED. Not
available when Relay 2 is set to Dual or
Sensor 2 in the System Menu.
0:00 – 99:59
0
Min:
Sec
SAMPLE
The time for the sensor shutter to remain
open when Rate Sampling is enabled in the
System Menu. Not available when Sampling
is OFF in System Menu.
0 - 9999
0
Sec
HOLD
The time for the sensor shutter to remain
closed when Rate Sampling is enabled in the
System Menu. Not available when Sampling
is OFF in System Menu.
0 - 9999
0
Sec
SENS AVG
Enable/disable crystals for this film. See the
Sensor Selection section of this chapter. Not
available when Relay 2 is set to Dual in the
System Menu.
Enabled/
Disabled
Ch1
Enabled