INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 32)

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SQM-160 Operating Manual
3.3 Film Menu
The Film Menu programs the SQM-160 for the materials that will be deposited.
Ninety-nine films can be stored, but only one film is active at any time.
1 Press Program to enter program mode.
2 Use the Control Knob to scroll to the desired Film # (1-99).
3 Press the Control Knob or Next to enter the film parameters for the selected
film.
4 Use Next and Prev to move through the film parameters, shown in Display 1
(refer to
Figure 3-1 ).
5 Use the Control Knob to adjust the parameter value, shown in Display 2 (refer
to
Figure 3-1 ), to the desired setting.
6 Press the Control Knob or Next to save the displayed value and move to the
next material parameter. Press Clear to abandon the change and return to the
original setting.
7 Press Program to exit the Film Menu and return to normal mode.
Figure 3-2 and Table 3-1 detail the parameters available in the Film Menu. Refer
to later sections of this chapter for instructions on setting specific film parameters.
Figure 3-2 Film Menu Parameters
Program
Film 1
Film 99
- DENSITY
- TOOLING
- Z-FACTOR
- FINL THK
- THK SET *
- TIME SET *
- SAMPLE *
- HOLD *
- SENS AVG *
- 1
- 2
- 3
- 6
Sensors 3 - 6
show only if the
four-sensor
option card is
installed
Film Selection Film Parameters Menu Sub-Menu
NOTE: Depending on System Menu setup, selections marked with a *
may not be available. See Table 3-1.