INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 94)

6 - 18
IP
N 07
4-
51
1-
P1
C
SQM-160 Operating Manual
12 Verify electrical continuity from the center pin of the Microdot connector on the
feedthrough to the un-terminated end of the six-inch BNC cable.
13 Verify electrical isolation from the center pin to electrical ground (feedthrough
body).
If the feedthrough/six-inch BNC cable system is found to be defective, look for
defective contacts at the feedthrough to BNC cable connection. Repair or replace
the feedthrough as necessary, re-attach the BNC cable to the XIU and in-vacuum
cable to the Crystal head and repeat this procedure starting at step 2.
6.4.1.3 Sensor Head Or Monitor Crystal
Diagnostic Procedure
NOTE: The procedure is for use with front load style sensor heads.
1 Remove the Crystal Cover from the Sensor Head.
2 Refer to Figure 6-7 on page 6-15 . Connect the Crystal Sensor Emulator to the
Sensor Head at Point C.
 If the Crystal Fail message disappears after approximately 5 seconds the
Sensor Head is operating properly. Re-insert the Crystal Cover into the
Sensor Head.
 If the Crystal Fail message remains, continue at step 3.
3 Disconnect the in-vacuum cable from the Sensor Head and the feedthrough.
Remove the Crystal Sensor Emulator from the Sensor Head.
4 Using an Ohm meter, verify the electrical connections on the Sensor Head.
 Verify there is electrical continuity from the center pin contact on the
Microdot connector on the Sensor Head to the leaf spring contact in the
Sensor Head. Take care not to apply to much pressure on the center pin of
the microdot connector as it may become damaged.
 There must be electrical isolation between the center pin of the Microdot
connector and the Sensor Head body.
If the Sensor Head is found to be defective, contact INFICON to have the Sensor
Head repaired.