INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 43)

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SQM-160 Operating Manual
3.15 Thickness Setpoint
The Thickness Setpoint closes a relay when a programmed thickness is reached.
This setpoint is independent from Final Thickness, which always closes the source
shutter.
To program the Thickness Setpoint:
1 Press Program to enter Program mode.
2 Press Prev to enter the System Menu.
3 Press Next until SAMPLING is shown.
4 Turn the Control Knob right to turn OFF the Sampling function. Press the
Control Knob to accept the value.
5 Press Program to exit the System Menu and return to normal mode.
6 Press Program to re-enter Program mode.
7 Use the Control Knob to scroll to the desired Film # (1-9), then press the Control
Knob or Next to enter the Film Parameter menu for the selected film.
8 Press Next until THK SET is shown, not FINL THK.
9 Use the Control Knob to set the thickness setpoint. Press the Control Knob to
accept the value.
10 Press Program to exit the Film Menu and return to normal mode.
When the Thickness Setpoint is reached, the Thk SP LED lights and the relay
closes. Use the Zero switch to open the relay and zero thickness at any time.
NOTE: The Thickness Setpoint relay is a dual function relay. It can be
programmed either to indicate a thickness, or to control a sensor shutter
for rate sampling. See
section 3.13, Rate Sampling, on page 3-11 . See
Chapter 4 for relay wiring.