INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 96)

6 - 20
IP
N 07
4-
51
1-
P1
C
SQM-160 Operating Manual
6.4.2 Sensor Cover Connection
The Crystal Sensor Emulator can be used to verify the measurement system for
INFICON Thin Film Deposition Controllers and Monitors.
However, the Crystal Sensor Emulator's Sensor Cover Connector is compatible
with some sensor heads, and is incompatible with others. This is discussed in the
following sections.
6.4.2.1 Compatible Sensor Heads
The Sensor Cover Connection will fit the sensor heads shown in Table 6-4 .
6.4.2.2 Incompatible Sensor Heads
The Sensor Heads for which the Crystal Sensor Emulator's Sensor Cover
Connector will not fit are shown in
Table 6-5 .
NOTE: The Crystal Sensor Emulator’s Sensor Cover will not fit the crystal holder
opening of the older style INFICON transducers that have the soldered
finger springs.
Table 6-4 Compatible Sensor Heads
Sensor Head Part Number
Front Load Single Sensor Head SL-XXXXX
Front Load Dual Sensor Head DL-AEXX
Table 6-5 Incompatible Sensor Heads
Sensor Head Part Number
Front Load UHV Bakeable Sensor Head BK-AXX
Cool Drawer Single Sensor Head CDS-XXXXX
Sputtering Sensor Head 750-618-G1
CrystalSix Sensor Head 750-446-G1
Cool Drawer Dual Sensor Head CDD-XXXX
Crystal12 Sensor Head XL12-XXXXXX
RSH-600 Sensor Head 15320X-XX