INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 34)

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SQM-160 Operating Manual
3.4 System Menu
The System Menu sets values that pertain to the overall functions of the SQM-160
and to the vacuum system's setup. System Menu parameters apply to all films.
1 Press Program to enter program mode.
2 Press Prev to enter the System Menu.
3 Use Next and Prev to move through the system parameters.
4 Use the Control Knob to adjust the parameter value shown in Display 2 to the
desired setting.
5 Press the Control Knob or Next to save the displayed value and move to the
next material parameter. Press Clear to abandon the change and return to the
original setting.
6 Press Program to exit the System Menu and return to normal mode.
Figure 3-3 System Parameters Menu
Program Prev
- TIMEBASE
- SIM MODE
- DISPLAY
- RATE RES
- RATEFILT
- RELAY 2
- SAMPLING
- BAUDRATE
- ETCH
- xTOOLING
- RELAYS
- FM IN/MAX
- R/T BNDS
- THCK (A)
- THCK(Nm)
- MASS
- FREQ
- TIME SP
- DUAL
- SENS 2
- FREQ MIN
- FREQ MAX
- xTLTOOL1
- xTLTOOL6
- RELAY 1
- RELAY 4
System Parameters Menu Sub-Menu
- RATE MIN
- RATE MAX
- THICKMIN
- THICKMAX
Table 3-2 System Menu
Display Description Range Default Units
TIMEBASE Time required for a measurement.
Longer times yield higher accuracy. 0.15 – 2.00 0.25 Sec.
SIM MODE Simulates sensor inputs. On/Off Off
DISPLAY Selects Rate/Thickness in Angstroms,
Rate/Thickness in Nanometers, Frequency,
or Mass (ugm/cc) display. THCK/nÅnM/FRE
Q/MASS
Rate
RATE RES Sets rate resolution to 0.01 or 0.1 Å/s. Hi/Low Low