19 analog output configuration, 20 i/o connections, Section 3.20, i/o – INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
3.19 Analog Output Configuration
The SQM-160 analog outputs must be set to match the device that will be attached
to the Rate or Thickness output.
To set up the analog outputs in the System Menu:
1
Press Program to enter Program mode.
2
Press Prev to enter the System Menu.
3
Use Next to move through the system parameters until R/T BNDS is displayed.
4
Press the Control Knob to display RATE MIN.
5
Adjust the Control Knob to the Rate desired for a 0 V output.
6
Press the Control Knob to save the value and display the RATE MAX setting.
7
Adjust the Control Knob to the Rate desired for a 5 V output.
8
Press the Control Knob to save the value and display the THICK MIN setting.
9
Repeat steps 5-8 to adjust the Thickness output values.
10
Press Program to exit the System Menu and return to normal mode.
Refer to
for more information on setting SQM-160 System
parameters.
3.20 I/O Connections
A 15-pin female D-sub connector is included with the instrument to connect digital
I/O to the SQM-160 Relay I/O connector. The figure below shows the solder-side
pin assignments for the supplied connector.
Figure 3-5 Relay I/O Connector Rear View
1
8
9
15