INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 85)

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SQM-160 Operating Manual
6.3.1 Front Load
Follow the procedure below to replace the crystal in the Front Load sensor: (see
Figure 6-1 )
1 Gripping the crystal holder with your fingers, pull it straight out of the sensor
body.
2 Gently pry the crystal retainer from the holder (or use the Crystal Snatcher; see
Figure 6-6 on page 6-14 ).
3 Turn the crystal holder over and the crystal will drop out.
4 Install a new crystal, with the patterned electrode face up.
5 Push the retainer back into the crystal holder and replace the crystal holder in
the sensor body.
Figure 6-1 Front Load Crystal Sensor (Exploded)
Front Load Crystal Holder
(IPN 750-172-G1)
Front Load Standard
Crystal Sensor Body
(IPN 750-207-G1)
Crystal (IPN 008-010-G10)
Fully Coated Face (Gold)
Finger Spring Contact
(IPN 750-171-P1)
Crystal Retainer
(IPN 007-023)
In-Vacuum Cable
To XIU
Water Tubes