INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 97)

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SQM-160 Operating Manual
6.4.3 Emulator Specifications
Dimensions
1.58 in. diameter x 1.79 in.
(40.13 mm diameter x 45.47 mm)
Temperature Range
0 to 50
o
C
Frequency
760-601-G2: 5.5 MHz ±1 ppm at room temperature
Materials
304 Stainless Steel, Nylon, Teflon ® , brass. Some internal components contain zinc,
tin, and lead.