Document Outline

• Cover Page
• Title Page
• Trademarks
• Disclaimer
• Copyright
• Declaration Of Conformity
• Warranty
• Table Of Contents
• Chapter 1 Introduction
  • 1.1 Introduction
    • 1.1.1 Related Manuals
  • 1.2 Instrument Safety
    • 1.2.1 Definition of Notes, Cautions and Warnings
    • 1.2.2 General Safety Information
    • 1.2.3 Earth Ground
  • 1.3 How To Contact INFICON
    • 1.3.1 Returning Your SQM-160
  • 1.4 Specifications
    • 1.4.1 Measurement
    • 1.4.2 Film Parameters
    • 1.4.3 System Parameters
    • 1.4.4 Digital I/O
    • 1.4.5 General Specifications
  • 1.5 Unpacking and Inspection
  • 1.6 Parts and Options Overview
    • 1.6.1 Base Configurations
    • 1.6.2 Accessories
    • 1.6.3 Sensors
• Chapter 2 Quick Start
  • 2.1 Introduction
  • 2.2 Installation
  • 2.3 Front Panel
  • 2.4 Rear Panel
  • 2.5 System Connections
  • 2.6 Film Setup
  • 2.7 Depositing a Film
• Chapter 3 Operation
  • 3.1 Introduction
  • 3.2 Menu Selection
  • 3.3 Film Menu
  • 3.4 System Menu
  • 3.5 Sensor Selection
  • 3.6 Sensor Frequency
  • 3.7 Sensor Tooling
  • 3.8 Display Units
  • 3.9 Crystal Life
  • 3.10 Zero Thickness
  • 3.11 Shutter Operation
  • 3.12 Dual Sensors
  • 3.13 Rate Sampling
  • 3.14 Time Setpoint
  • 3.15 Thickness Setpoint
  • 3.16 Simulate Mode
  • 3.17 Defaulting the Memory
  • 3.18 Relay Operation
  • 3.19 Analog Output Configuration
  • 3.20 I/O Connections
  • 3.21 Rack Mounting Procedure
• Chapter 4 SQM-160 Comm Software
  • 4.1 Introduction
  • 4.2 Installation
  • 4.3 Main Window
  • 4.4 Data Log Menu
  • 4.5 Films Menu
  • 4.6 System Menu
  • 4.7 Communications Menu
  • 4.8 Graph Options
  • 4.9 Help Menu
• Chapter 5 Communications
  • 5.1 Introduction
    • 5.1.1 RS-232C Serial Port
    • 5.1.2 USB Port
    • 5.1.3 TCP/IP Ethernet Port
      • 5.1.3.1 How to Set Up the Network Protocol on the PC
      • 5.1.3.2 How to change the IP address of the SQM-160
  • 5.2 SQM-160 Comm Software
  • 5.3 SQM-160 Communications Protocol
  • 5.4 Commands
    • 5.4.1 Command: @
    • 5.4.2 Command: A
    • 5.4.3 Command: B
    • 5.4.4 Command: C
    • 5.4.5 Command: D
    • 5.4.6 Command: J
    • 5.4.7 Command: L
    • 5.4.8 Command: M
    • 5.4.9 Command: N
    • 5.4.10 Command: O
    • 5.4.11 Command: P
    • 5.4.12 Command: R
    • 5.4.13 Command: S
    • 5.4.14 Command: T
    • 5.4.15 Command: U
    • 5.4.16 Command: W
    • 5.4.17 Command: Y
    • 5.4.18 Command: Z
  • 5.5 CRC Examples
    • 5.5.1 Visual Basic® 5/6
    • 5.5.2 Java®
    • 5.5.3 C++
• Chapter 6 Troubleshooting and Maintenance
  • 6.1 Troubleshooting Guide
  • 6.2 Troubleshooting
    • 6.2.1 Troubleshooting the SQM-160
    • 6.2.2 Troubleshooting Sensors
    • 6.2.3 Troubleshooting Computer Communications
  • 6.3 Replacing the Crystal
    • 6.3.1 Front Load
    • 6.3.2 Cool Drawer
    • 6.3.3 Bakeable Sensor
    • 6.3.4 Sputtering Sensor
    • 6.3.5 Crystal Snatcher
  • 6.4 Crystal Sensor Emulator IPN 760-601-G2
    • 6.4.1 Diagnostic Procedures
      • 6.4.1.1 Measurement System Diagnostic Procedure
      • 6.4.1.2 Feedthrough Or In-Vacuum Cable Diagnostic Procedure
      • 6.4.1.3 Sensor Head Or Monitor Crystal Diagnostic Procedure
      • 6.4.1.4 System Diagnostics Pass But Crystal Fail Message Remains
    • 6.4.2 Sensor Cover Connection
      • 6.4.2.1 Compatible Sensor Heads
      • 6.4.2.2 Incompatible Sensor Heads
    • 6.4.3 Emulator Specifications
• Chapter 7 Calibration Procedures
  • 7.1 Importance of Density, Tooling and Z-Ratio
  • 7.2 Determining Density
  • 7.3 Determining Tooling
  • 7.4 Laboratory Determination of Z-Ratio
• Chapter 8 Measurement and Theory
  • 8.1 Basics
    • 8.1.1 Monitor Crystals
    • 8.1.2 Period Measurement Technique
    • 8.1.3 Z-match Technique
    • 8.1.4 Active Oscillator
• Appendix A Material Table
  • A.1 Introduction