INFICON XTC/C Thin Film Deposition Controller User Manual
Xtc/c xtc/2, Thin film deposition controller
Advertising
This manual is related to the following products:
Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Declaration Of Conformity
- Registration Card
- Warranty
- Table Of Contents
- Chapter 1 Introduction and Specifications
- 1.1 Instrument Safety
- 1.2 Introduction to the Instrument
- 1.3 Specifications
- 1.4 Guide to the Use of the Manual
- 1.5 XTC/C Users and Installers Note
- 1.6 Related Manuals
- 1.7 How To Contact Customer Support
- Chapter 2 Quick Use Guide
- 2.1 Unpacking, Initial Inspection and Inventory
- 2.2 Voltage Selection
- 2.3 Installation Guide and Schematic
- 2.4 XTC/2 Front Panel Description
- 2.5 XTC/C Front Panel Description
- 2.6 Rear Panel Description
- 2.7 Operation as a Deposition Monitor
- 2.8 Operation as a One Layer Controller
- 2.9 Operation as a Multi-Layer Controller
- Chapter 3 Installation
- 3.1 Installing the Instrument - Details
- 3.2 Electrical Grounding and Shielding Requirements
- 3.3 Connection to Rear Panel
- 3.4 Sensor Selection Guide
- 3.5 Guidelines for Transducer Installation
- 3.6 Use of the Test Mode (XTC/2 Only)
- 3.7 Input and Output Details
- 3.8 Computer Communications
- 3.9 Co-Deposition (Two Unit Interconnection)
- Chapter 4 Programming System Operation Details
- 4.1 State and Measurement System Sequencing
- 4.2 State Descriptions and Parameter Limits
- 4.3 Alarms and Stops
- 4.4 Recovering From "STOPS"
- 4.5 Tuning the Control Loop
- 4.6 Setting S&Q Parameters (Soft Crystal Failures)
- 4.7 Rate Ramps
- 4.8 Use of the Hand Controller (Option)
- 4.9 Setting the Soak and Idle Power Levels
- 4.10 Implementing RateWatcher
- 4.11 Crystal Fail
- 4.12 Completing on TIME-POWER
- 4.13 Crystal Fail Inhibit
- 4.14 Shutter Delay
- 4.15 Crystal Switch Details
- 4.16 Start Layer Without Backup Crystal Configuration
- 4.17 Crystal Life and Starting Frequency
- Chapter 5 Calibration and Measurement
- Chapter 6 Adjustments and Problems
- Appendix A Table of Densities and Z-ratios
- Index