INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 100)

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STM-2XM Operating Manual
5.8.4 Command: E/F
Command Type . . . . . . . . . . . . . . . . Query
Command Structure . . . . . . . . . . . . . CSID_class Pid SYSTEM GROUP
Syntax . . . . . . . . . . . . . . . . . . . . . . . En
Description . . . . . . . . . . . . . . . . . . . . Queries System Settings and Setup
parameters.
Command Type . . . . . . . . . . . . . . . . Update
Syntax . . . . . . . . . . . . . . . . . . . . . . . Fn=value
Description . . . . . . . . . . . . . . . . . . . . Updates System Settings and Setup
parameters.
Parameters. . . . . . . . . . . . . . . . . . . . (See Table 5-3 .)
Table 5-3 E/F command
# Command Structure Comments Values
1 CSID_SUP_SNSR Sensor has largest effect. It
should be written first to set
top level. #sensors:#shutters
0 - 1:0 - Single Open
1 - 1:1 - Single w/Shutter
2 - 2:1 - Dual 1 Shutter
3 - 2:0 - Dual Open
4 - 2:2 - Dual 2 Shutter
2 CSID_SUP_TOOLX1S1 Crystal 1 tooling versus
source/substrate on
Channel 1 Tooling 10.0 to 999.9%
Default 100.0
3 CSID_SUP_TOOLX2S1 Crystal 2 tooling versus
source/substrate on
Channel 1 Tooling 10.0 to 999.9%
Default 100.0
4 CSID_SUP_TOOLX1S2 Crystal 1 tooling versus
source/substrate on
Channel 2 Tooling 10.0 to 999.9%
Default 100.0
5 CSID_SUP_TOOLX2S2 Crystal 2 tooling versus
source/substrate on
Channel 2 Tooling 10.0 to 999.9%
Default 100.0
6 CSID_SUP_WHTRATIO Relative weight ratio of
Channel 2 to Channel 1
(averaging only)
NOTE:
Available when
dual open sensors
mode is selected.
Weight Ratio 0 to 100%
Default 50%
7 CSID_SUP_SHTR Substrate shutter setup
supshtr_class 0-4 0 - None
1 - Channel 1
2 - Channel 2
3 - Shared
4 - Dual