INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 58)

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STM-2XM Operating Manual
3.4 Operation
3.4.1 No Shutter Delay
Press OPEN. STM-2XM transitions from Ready to Deposit. The setpoint time,
setpoint thickness, and end thickness indicators are cleared. When the
accumulated thickness reaches the End Thickness value for the active film (refer
to
section 3.2.1.1 on page 3-8 ), STM-2XM automatically closes the source shutter
and transitions back to the Ready phase.
NOTE: The substrate thickness is not zeroed when the deposit phase is entered.
This allows multiple layers to be deposited and the accumulated total
substrate thickness to be displayed (also known as thickness summing).
Zero the thickness by pressing ZERO before pressing OPEN to display the
thickness of a single layer.
3.4.2 Shutter Delay
From the Ready phase, press OPEN. STM-2XM will enter the shutter delay phase
(SHUT_DLY). The substrate shutter remains closed but the source shutter
(if installed) opens. This allows for preconditioning of the source and establishing
a steady rate prior to opening the substrate shutter.
While in shutter delay the Open indicator blinks. When ready to start depositing,
press OPEN again. STM-2XM will open the substrate shutter and enter the deposit
phase.
NOTE: Setpoint time, setpoint thickness, and end thickness indicators are cleared
at the beginning of the shutter delay phase.
3.4.3 Test Mode
Test mode allows STM-2XM settings and operation to be tested without performing
an actual deposition. Setting Test mode On provides a simulated rate, to simulate
the effects of a real deposition.
CAUTION
In Test mode, all setpoints, inputs, and outputs are active.
In Test mode, STM-2XM simulates attached sensors, and provides a simplified way
to become familiar with the STM-2XM front panel indicators and programming.
It is possible to open or close the shutter to simulate deposition and zero readings.
It is also possible to test the Time and Thickness Setpoint relays and indicators.