INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 117)

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STM-2XM Operating Manual
5.8.11.3 Film State
FilmState_BOGU . . . . . . . . . . . . . . . 0 STARTUP STATE
Does not persist
FilmState_INACT . . . . . . . . . . . . . . . 1 INACTIVE
This channel is not operational
FilmState_DEAD_TPW. . . . . . . . . . . 2 FAIL TPW
Crystal failed/deposit estimated
FilmState_DEAD . . . . . . . . . . . . . . . 3 X FAIL
Crystal failed
FilmState_MONITOR . . . . . . . . . . . . 4 READY
Crystal good, shutters closed
FilmState_SHUT_DLY . . . . . . . . . . . 5 SHUT DLY
Source open/substrate closed
FilmState_COAST . . . . . . . . . . . . . . 6 COAST
Estimating rate/thickness deposition
FilmState_STARE. . . . . . . . . . . . . . . 7 DEPOSIT
Actively measuring
FilmState_PEEK. . . . . . . . . . . . . . . . 8 DEPOSIT
FilmState_HOLD . . . . . . . . . . . . . . . 9 HOLD
FilmState_STABILIZ . . . . . . . . . . . . . 10 STABILIZ
FilmState_MANUAL . . . . . . . . . . . . . 11 MANUAL
Force shutters open,crystal failed