INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 25)

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STM-2XM Operating Manual
1.6.3 Sensors
Front Load Single Sensor. . . . . . . . . . . . . . . . . . . . . PN SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . PN DL-AXXX
Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . . PN CDS-XXFXX
Cool Drawer Dual Sensor. . . . . . . . . . . . . . . . . . . . . PN CDD-XFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-618-G1
UHV Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . PN BK-AXF
Low Profile Single Sensor . . . . . . . . . . . . . . . . . . . . PN 783-500-042
Low Profile Dual Sensor. . . . . . . . . . . . . . . . . . . . . . PN 783-500-093
Low Profile Bakeable Single Sensor . . . . . . . . . . . . PN 783-500-009
Low Profile Bakeable Dual Sensor. . . . . . . . . . . . . . PN 783-500-050
NOTE: Low Profile Sensors also have shuttered options as well as options without
cooling lines.
NOTE: "X" in part number indicates customer-selectable option, see
www.inficon.com for Sensor Datasheets.
NOTE: Shuttered sensors require a feedthrough with an air line and solenoid valve
PN 750-420-G1.
NOTE: Multi-crystal (rotary) sensors should not be used with STM-2XM.