INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 115)

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STM-2XM Operating Manual
14 QTWIN_SHTSBS Substrate shutters 1 - True
Substrate shutter is open
0 - False
Substrate shutter is closed
Channels not being used will
return 0.
This is the logical state of the
process, not the actual I/O
relay state.
15 QTWIN_SHTSNS Sensor shutters 1 - True
Sensor shutter is open
0 - False
Sensor shutter is closed
Channels not being used or
coasting during rate sampling
will return 0.
This is the logical state of the
process, not the actual I/O
relay state.
16 QTWIN_CH_RATEM Rate µg/cm²s
17 QTWIN_CH_RATET1 Rate Å/s
18 QTWIN_CH_C_MASS Current mass of current film µg/cm²s
19 QTWIN_CH_C_THIK Current thickness of current
film kÅ
20 QTWIN_CH_STATE Film state of FilmState_class
enumeration Value 0 to 11(see section
5.8.11.3 )
21 QTWIN_CH_TIME Film Timer 0:00:00 to 9:59:59 h:mm:ss as
timer counts up
Table 5-7 Q command (continued)
# Command Structure Comments Values