INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 45)

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STM-2XM Operating Manual
Deposit Rate . . . . . . . . . . . . . . . . . . Desired rate for the film. Used for the rate
deviation graph (and analog output) and to
ensure the Rate digital output is steady and
within tolerance.
Shutter Delay . . . . . . . . . . . . . . . . . Activates a shutter delay for the film. During
a shutter delay, STM-2XM will monitor the
rate from the source but will keep the
substrate shutter closed. OPEN stops shutter
delay and starts the deposit phase.
NOTE: Available only if the appropriate
shutter setup is present.
Rate Sampling . . . . . . . . . . . . . . . . When using rate sampling, the sensor
shutter opens and closes during deposit to
reduce the exposure of the crystal to the
evaporant stream during deposition. This
feature is intended to extend crystal life for
processes with stable rates.
NOTE: Available only if the appropriate
shutter setup is present.
Rate Sampling Period . . . . . . . . . . Determines how often STM-2XM samples
and holds during Rate Sampling. Rate
Sampling Period minus Rate Sampling Dwell
time yields an approximate hold time (how
long STM-2XM will keep the sensor shutter
closed).
Rate Sampling Dwell . . . . . . . . . . . Determines the amount of time STM-2XM
will keep the sensor shutter open.
Time Power Enable . . . . . . . . . . . . STM-2XM will use the last known steady rate
and continue to accumulate thickness/mass
at this rate if a crystal fail occurs. This allows
films to be completed even in the event of a
crystal failure.
Xtal Life Min . . . . . . . . . . . . . . . . . . Adjustable to enter the percent life at which
the crystal will fail. This sets the minimum
acceptable crystal life before a forced failure.
Auto Fail/Force Switch Xtal . . . . . . If the sensor(s) used by this film have a life
lower than Xtal Life Min, and the Auto Fail
parameter is true, then the crystal is failed.
Used to switch to a backup sensor at a given
crystal life.