INFICON STM-2XM 2-Channel Rate/Thickness Monitor - Manual (Page 60)

3 - 24
PN
07
4-
61
4-
P1
A
STM-2XM Operating Manual
HOLD . . . . . . . . . . . . . . . . . . . . . . . . Sensor shutters are closed during deposit,
and STM-2XM is incrementing thickness at
the last known rate.
NOTE: STM-2XM will not enter the HOLD
phase unless the measured rate is at
least 50% of the programmed
deposit rate for the film or 0.5 Å/s.
STM-2XM uses the greater of the
two values.
STABILIZ . . . . . . . . . . . . . . . . . . . . . After being in the HOLD phase, the sensor
shutter(s) are opened and STM-2XM waits
until the reading stabilizes before
accumulating the measured rate.