1 system control buttons – INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual
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STM-2XM Operating Manual
3.1.1 System Control Buttons
NOTE: All button functions can be duplicated with remote inputs.
Figure 3-2 Button functions
OPEN . . . . . . . . . . . . . . . . . . . . . . . . Press OPEN to open the source/substrate
shutter. When OPEN is pressed, all setpoints
(setpoint time, setpoint thickness, and end
thickness) are cleared and the film will enter
the deposit state.
NOTE: Pressing OPEN while STM-2XM is in
the deposit state has no effect.
CLOSE. . . . . . . . . . . . . . . . . . . . . . . Press CLOSE to close the source/substrate
shutter and terminate the deposition.
STM-2XM will then enter the Ready state.
NOTE: Pressing CLOSE while STM-2XM is
in the Ready state has no effect.
Open for
Channel 1
Close for
Channel 1
Zero for
Sensor 1
Open for
Channel 2
or
Select
Crystal 1
(Backup
Mode)
Crystal 2
Close for
Channel 2
or
Select
(Backup
Mode)
Zero for
Sensor 2