1 system control buttons – INFICON STM-2XM 2-Channel Rate/Thickness Monitor User Manual

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STM-2XM Operating Manual

3.1.1 System Control Buttons

NOTE: All button functions can be duplicated with remote inputs.

Figure 3-2 Button functions

OPEN . . . . . . . . . . . . . . . . . . . . . . . . Press OPEN to open the source/substrate

shutter. When OPEN is pressed, all setpoints
(setpoint time, setpoint thickness, and end
thickness) are cleared and the film will enter
the deposit state.

NOTE: Pressing OPEN while STM-2XM is in

the deposit state has no effect.

CLOSE. . . . . . . . . . . . . . . . . . . . . . . Press CLOSE to close the source/substrate

shutter and terminate the deposition.
STM-2XM will then enter the Ready state.

NOTE: Pressing CLOSE while STM-2XM is

in the Ready state has no effect.

Open for

Channel 1

Close for

Channel 1

Zero for

Sensor 1

Open for

Channel 2

or

Select

Crystal 1

(Backup

Mode)

Crystal 2

Close for

Channel 2

or

Select

(Backup

Mode)

Zero for

Sensor 2

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